SiO2-Ring
AZO
ITO
金屬靶
金屬靶-1
靶材
靶材(Pure Element Targets) --- Ti, Zn, Zr, Ta, Hf, Al, La, Nd, In, …
合金靶材(Alloy Targets) --- Ni/Cr, Ti/Al, Sn/Ag, Ni/V …
混合靶材(Compound Targets) --- ITO, Ta2O5, SiO2, SiO, TiO2, AZO, GZO, IZO, ZnO, …
